SITG Low Voltage Solutions

Low Voltage Ionization Solutions & Control

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Model 5941 CE In-tool Micro Blower

Small. Compact. High Performance!

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Model 5832 CE Benchtop Blower

Fast, Reliable ESD Protection

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Model 5842 Critical Environment Overhead Blower

Lightest Overhead Blower Available in the Industry

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Model 4903Photon Bar Ionizer

The Ultimate Modular Photon Soft X-ray Bar

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Model 4901Photon Pin Ionizer

The Ultimate All-in-One Advanced Photon Ionization for any Ultra-clean Process

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Model 5645Modulated Pulse Ultra-clean AeroBar®

Available with Active Monitoring and Feedback Control with Novx

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Novx 3352/3362 with MiniPulse OptionVoltage Detection Systems

Detect, Measure, Record and Monitor Electrostatic Voltages

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Novx 7000Critical Process Monitor

Monitoring Critical Electrostatic Parameters

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• Equipment Front End Modules (EFEM)
• Loading and Unloading Station
• Wet Cleaning Process
• Film Laminating on Wafer/Reticle/Substrates
• Inspection and Test Station in Open Areas
• Storage Areas
• Retrofit Old Equipment with Static Charge Protection

• Perfect ion balance—Photon ionizers are naturally free from ion balance issues since they produce an equal number of positive and negative ions when molecules are exposed to soft X-ray energy
• Free from particle attraction—While CDA and laminar airflow help the decay time performance, Photon Ionizers utilize soft X-ray technology and do not need an air supply for operation, so no contamination particles are generated
• No maintenance is required—Unlike conventional ionizers of Corona discharge on emitter tips, Photon ionizers do not need any cleaning or ion balance tuning during their lifetime

• Expanding into semiconductor front-end and back-end manufacturing as well as wafer oxidation, exposure, etching, ion implant, glass, wafer dryer, etc.
• Post-production for diffusion process, in-tool applications for inspection tools
• Confine/narrow space targeted ionization, pick-and-place, surface mount (SMT) and in-tool install

• ±5V with Novx System or Novx Inside version
• ISO 14644-1 Class 1 and Extended ISO Class 1 with SCSi emitter
• Centralize power and control with widely adjustable MP Control Software
• Sensor input, FMS connection, alarms, power, and communications are located on the same end of the bar
• The optional Power Distribution Box Model 5601 with MP Control Software can communicate with and centralize power up to eight 5645 AeroBars.

• Back-end Semiconductor

• Electronic Assembly

• IC Test Handler

• Bowl Feeder

• Optical Inspection

• Suitable for critical cleanliness control
• Low voltage tube type
• Maintenance-free
• Alarm output signal

• Microprocessor-based controllers, multichannel, digital I/O, auxiliary I/O, local addressability, RS-485/Modbus, or Ethernet data output
• Passive and Active antenna configurations
• Precision resolution
• Programmable closed-loop control for up to 3 Steady-state DC ionizer fans or a 3-fan blower
• Programmable alarm set-points with tool shutdown option
• Voltage/polarity displays, local LEDs each channel
• MiniPulse ESD event detection option

• Part of the Novx Smart Manufacturing Electrostatic Control Management System
• ±3V or better balance (±1V with the Novx Inside or Novx System versions)
• Cleanliness rated at ISO 14644-1 Class 3
• Options for warning/alarm 2-level notification, sensor input, FMS connection, alarms, and management control
• Auto-Clean System
• Angled Collimator

At either end of the bar, there is a one-touch fitting tapered 1/8 BSPT bushing for CDA connection. Both ends are for single-point use only. Daisy-chain gas connections are not possible. For bar lengths of 1600 mm and above, it is recommended that air be applied to both ends of the bar.

• ±3V or better balance
• Compact size

• Cleanliness rated at ISO 14644-1 Class 3
• Facility Monitoring System (FMS) connection
• Auto-clean system
• Simple Status Indicator

• Wafer or Panel Level Packaging Equipment
• IC Test Handler
• Advanced Electronic Assembly
• Hard Disk Driver manufacturing

• Smart Signal Processing
• Multiple sensor and antenna styles
• Daisy-chainable; RS-485 or Ethernet output
• ESD event detection tracking
• Three options for field voltage monitoring
• User-programmable alarm set-points with automated messaging
• Closed-loop control to tool computer
• Plug-in modules allow factory upgrades

• Provides the best corona-based ESD protection for maximizing yields
• Designed for use in critical environments with a controlled level of contamination
• Increased control with immediate notification of alarms and the prevention of unauthorized adjustment to power or fan speed
• Automated emitter point cleaning, reducing maintenance costs and time
• Customer “settable” 360-degree output direction

Today’s ionization and monitoring solutions demand very low voltage swings, tight balance control, and fast decay times to meet the semiconductor industry’s and its associated manufacturing operations’ ever-increasing control requirements. It is crucial to maintain electrostatic-controlled and contamination-free environments.

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The Novx 7000 System enables monitoring for critical electrostatic variables in both front-end and back-end semiconductor manufacturing environments. The multi-function sensing capability and industrial communication abilities enable integration of real-time monitoring with process electrostatic control. As a general tool for electrostatic monitoring of ESD events, electrostatic fields, particle density, personnel and workstation grounding, and the ability to control ionizer balance and discharge parameters, it also enhances monitoring uses in FPD, disk-drive and medical manufacturing applications.

• Expanding into semiconductor front-end and back-end manufacturing as well as wafer oxidation, exposure, etching, ion implant, glass, wafer dryer, etc.
• Post-production for diffusion process, in-tool applications for inspection tools
• Confine/narrow space targeted ionization, pick-and-place, surface mount (SMT) and in-tool install

• Discriminates ESD events from other events/background noise
• Adapts to a variety of process applications, environmental conditions and configurations
• Ability to connect multiple units with a single output or IP address
• Logs events
• Select appropriate detection method for the application
• Customize each sensor location; ensures prompt alarm notifications
• Provides ability to shut down tool when thresholds are exceeded
• Provides flexibility to reconfigure monitors for processes with differing requirements

• Provides easy integration, cost/performance advantages over other monitoring solutions, direct communication to other Novx instruments, or a tool controller.
• Monitor voltage at distances and ionizer balance; perform In Situ decay testing without the added expense of a CPM
• Measure and record voltage down to 0.1V
• Enable closed-loop feedback control to select ionizers based on balance or decay test results
• Reduce process variations, decrease scrap/rework, and improve process yields
• Visual indicators at the instrument
• Correlation of Electrostatic Charge (ESC) with Electrostatic Discharge (ESD)

• Provides active monitoring and feedback control on ESD protection with precise and stable balance
• Compatible with all device technology nodes
• Eliminating manual adjustment at the installed location
• Designed for overall ease of use and long maintenance cycles

• Perfect ion balance—Photon ionizers are naturally free from ion balance issues since they produce an equal number of positive and negative ions when molecules are exposed to soft X-ray energy
• Free from particle attraction—While CDA and laminar airflow help the decay time performance, Photon Ionizers utilize soft X-ray technology and do not need an air supply for operation, so no contamination particles are generated
• No maintenance is required—Unlike conventional ionizers of corona discharge on emitter tips, Photon ionizers do not need any cleaning or ion balance tuning during their lifetime

• Clean (Manual/Timer): In “Timer” mode, the EPC will run once every 7 days. In Manual mode, the EPC will only run when triggered as described in the I/O User Input/Output, EPC section
• Clean at Power Up: When enabled, the EPC will run when the unit is powered on
• Antenna 1/Master*: Enables the remote control input for channel 1. For more information on setting up the feedback inputs, refer to Optional Antenna/Novx Operation later in the manual.
• Antenna 2*: Enables the remote control input for channel 2
• Antenna 3*: Enables the remote control input for channel 3
• Antenna 4*: Enables the remote control input for channel 4
• Fan Speed Select: Sets the Fan speed for all fans; refer to Fan Speed Selection later in this manual

* Not available in the standalone version.

• Visual Inspection on Wafer Surface or WLP-Devices
• Corner or Area Unable to Cover by Room Ionization
• Test Station
• Storage Area
• Manual Operation
• Old Equipment Retrofit with Static Charge Protection
• Laboratory and Research Room

• Front-End: Wafer testing
• Back-End: Die testing
• Back-End: Wafer/Panel Level Packaging
• Front-End and Back-End: EFEM
• Back-End: Loading and unloading
• PCB & Electronic Assembly: IC/Chips mounting on board or on flexible cable
• PCB & Electronic Assembly: IC/Chips testing

• Provides the best corona-based ESD critical environment protection available for maximizing yields
• Exceptional for the limited-space in-tool applications
• Designed for use in an environment with a controlled level of contamination
• Faster response to ionization failure with notification through a tool or FMS (FMS Simulator is available for checking tools in response to 5941 FMS alarms)
• Automates emitter point cleaning, reducing maintenance costs and time

• 3 versions: Standalone, Novx System, and Novx Inside
• Part of the Novx Smart Manufacturing Electrostatic Control Management System
• ±3V or better balance, standalone (±1V with Novx Inside or Novx System versions)
• Cleanliness rated at ISO 14644-1 Class 3
• Sensor input, FMS connection, alarms, and management control
• Built-in Auto-clean System with each fan
• Available in 2-3-4 fans; each with four fan speeds (high, med-high, med-low, low)

• Suitable for critical cleanliness control
• Low voltage tube type
• Pin-type designed for narrow, confined spaces, and in-tool applications
• Alarm output signal

• Provides the best ESD protection for maximizing yields
• Designed for use in an environment with a controlled level of contamination
• Increased control with immediate notification of alarms and the prevention of unauthorized adjustment to power or fan speed
• Automated emitter point cleaning for reduced maintenance cost and time
• Numerous options for flexibility and ease of use